Surface Topography Challenge 2023 - Espinosa Group - Sample P46
type: Dataset
version: 1
date published: 2025-05-12T21:19:48.593940+00:00
language: en
keywords: surface
keywords: topography
creator: Rosa Espinosa-Marzal
  type: Person
  given name: Rosa
  family name: Espinosa-Marzal
  affiliation: University of Illinois Urbana-Champaign
creator: Gus Greenwood
creator: Xuhui Zhang
  type: Person
  given name: Xuhui
  family name: Zhang
  affiliation: University of Illinois Urbana-Champaign
creator: Joaquin Yus
  type: Person
  given name: Joaquin
  family name: Yus
  affiliation: University of Illinois Urbana-Champaign
publisher: contact.engineering
provider: contact.engineering
included in data catalog: contact.engineering
license: https://creativecommons.org/publicdomain/zero/1.0/legalcode
is accessible for free: true
conditions of access: open access
distribution: DataDownload
  encoding format: application/zip
description: Sample P46 (Rougher) - CrN deposited on unpolished side of silicon wafer followed by isotropic reactive ion etching. Topography data collected using profilometry, scanning electron microscopy, and atomic force microscopy in tapping (AC) mode, quantitative imaging (i.e. fast force mapping) mode, and contact mode.

Gus Greenwood
type: Person
given name: Gus
family name: Greenwood
affiliation: University of Illinois Urbana-Champaign